The IEEE International Conference on Micro Electro Mechanical Systems (IEEE MEMS) is one of the premier annual events reporting research results on all scientific aspects of Micro/Nanoscale Devices and Systems, as well as their relevant technologies and industrial trends. This conference captures the rapid proliferation from the commitment and success of the multidisciplinary microsystems and nanotechnology research communities. In recent years, the annual IEEE MEMS Conference has often attracted more than 700 participants, 800+ abstract submissions and has established the forum for presenting over 200 select papers in lecture and poster sessions. Its highly integrated format provides ample opportunities for interactions among attendees, presenters, and exhibitors. For over 3 decades, IEEE MEMS 2021 has been the international forum where our multidisciplinary communities showcase our excellence in research and education, resilience and sustained endeavors, in advancing the field and venturing into new frontiers.